Prof. Dr.-Ing. Stefan Butzmann

Dr. rer. nat. Albrecht Brockhaus

Telefon: +49 (0)2 02 / 439-1415

Fax: +49 (0)2 02 / 439-1932

E-Mail: brockhaus{at}


Publikationen in referierten Zeitschriften:

  • S. Klee, A. Brockhaus, W. Wißdorf, M. Thinius, N. Hartmann, T. Benter: "Development of an ion activation stage for atmospheric pressure ionization sources", Rapid Commun. Mass Spectrom. 29 (2015) 143
  • H. Kim, A. Brockhaus, J. Engemann: "Atmospheric pressure argon plasma jet using a cylindrical piezoelectric transformer", Appl. Phys. Lett. 95 (2009) 211501
  • A. Brockhaus, R. Sauerbier, J. Engemann: "Comparison of three excitation schemes for cylindrical dielectric barrier discharges", Eur. Phys. J. Appl. Phys. 47 (2009) 22809
  • Zh. Kiss'ovsky, A. Brockhaus, D. Korzec, S. Kytzia, J. Engemann: "Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics II: radial distributions", Plasma Sources Sci. Technol. 16 (2007) 523
  • A. Brockhaus, G.F. Leu, V. Selenin, Kh. Tarnev, J. Engemann: "Electron release in the afterglow of a pulsed inductively coupled radiofrequency oxygen plasma", Plasma Sources Sci. Technol. 15 (2006) 171
  • G.F. Leu, A. Brockhaus, J. Engemann: "Diagnostics of a hexamethyldisiloxane/oxygen deposition plasma", Surf. Coat. Technol. 173-174 (2003) 928
  • A. Georg, J. Engemann, A. Brockhaus: "Investigation of a pulsed oxygen microwave plasma by time-resolved two-photon allowed laser-induced fluorescence", J. Phys. D: Appl. Phys. 35 (2002) 875
  • A. Schwabedissen, A. Brockhaus, A. Georg, J. Engemann: "Determination of the gas-phase Si atom density in radio frequency discharges by means of cavity ringdown spectroscopy", J. Phys. D: Appl. Phys. 34 (2001) 1116
  • St. Geisler, A. Brockhaus, J. Engemann: "Characteristics of a large diameter reactive ion beam generated by an electron cyclotron resonance microwave plasma", J. Vac. Sci. Technol. A 19 (2001) 539
  • A. Brockhaus, A. Georg, V. Wingsch, J. Engemann: "Plasma erosion of a magnesium RF cathode measured by laser-induced fluorescence", J. Vac. Sci. Technol. A 18 (2000) 927
  • St. Behle, A. Brockhaus, J. Engemann: "Time-resolved imvestigations of pulsed microwave-excited plasmas", Plasma Sources Sci. Technol. 9 (2000) 57
  • A. Brockhaus, St. Behle, A. Georg, A. Schwabedissen, Ch. Soll, J. Engemann: "Diagnostics of a chemically active, pulsed microwave plasma for deposition of quartz-like films, Contrib. Plasma Phys. 39 (1999) 399
  • A. Schwabedissen, Ch. Soll, A. Brockhaus, J. Engemann: "Electron density measurements in a slot antenna microwave plasma source by means of the plasma oscillation method", Plasma Sources Sci. Technol. 8 (1999) 440
  • A. Brockhaus, St. Behle, A. Georg, J. Engemann: "Ignition phase of a pulsed microwave-excited oxygen plasma", Journal de Physique IV 8Pr7 (1998) 297
  • St. Behle, A. Georg, Y. Yuan, J. Engemann, A. Brockhaus: Imaging of atomic oxygen in a microwave-excited oxygen plasma with two-dimensional optical emission spectroscopy", Surf. Coat. Technol. 97 (1997) 734
  • A. Brockhaus, Y. Yuan, St. Behle, J. Engemann: "Determination of chemically active species in a novel microwave plasma source by laser-induced fluorescence", J. Vac. Sci. Technol. A 14 (1996) 1882
  • D. Korzec, F. Werner, A. Brockhaus, J. Engemann, T.P. Schneider, R.J. Nemanich: "Characterization of a slot antenna microwave plasma source for hydrogen plasma cleaning", J. Vac. Sci. Technol. A 13 (1995) 2074
  • Y. Yuan, J. Bansky, J. Engemann, A. Brockhaus: "Ion energy determination for r.f. plasma and ion beam using a multigrid retarding field analyser", Surf. Coat. Technol. 74-75 (1995) 534
  • A. Brockhaus, D. Korzec, F. Werner, Y. Yuan. J. Engemann: "Characterization of a microwave plasma by in-situ diagnostics", Surf. Coat. Technol. 74-75 (1995) 431
  • A. Brockhaus, Y. Yuan, J. Engemann: "Determination of the ion velocity in a radio frequency ion beam by laser-induced fluorescence", J. Vac. Sci. Technol. A 13 (1995) 400
  • A. Brockhaus, C. Borchardt, J. Engemann: "Langmuir probe measurements in commercial plasma plants", Plasma Sources Sci. Technol. 3 (1994) 539
  • A. Brockhaus, J. Uhlenbusch: "Far-forward scattering of CO2 laser radiation by density fluctuations in a hollow cathode arc", Plasma Phys. Contr. Fusion 33 (1991) 1371
  • M. Bessenrodt-Weberpals, A. Brockhaus, P. Jauernik, H. Kempkens, C. Nieswand, J. Uhlenbusch: "Diagnostics of a steady-state low-pressure hollow cathode arc in argon", IEEE Trans. Plasma Science PS-14 (1986) 492

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